| Category | Name | |
|---|---|---|
|
Excimer Laser Gases
|
1.25%Kr/Ne
|
1.25% Krypton/ Neon
|
|
10ppmXe/3.5%Ar/Ne
|
10ppm Xenon/ 3.5% Argon/Neon
|
|
|
0.95%F2/1.25%Kr/Ne
|
0.95% Fluorine/ 1.25% Krypton/ Neon
|
|
|
0.95%F2/3.5%Ar/Ne
|
0.95% Fluorine/ 3.5% Argon/ Neon
|
|
|
Rare Gases
|
He
|
Helium
|
|
Kr
|
Krypton
|
|
|
Ne
|
Neon
|
|
|
Xe
|
Xenon
|
|
|
Specialty Gases
|
AsH3
|
Arsine
|
|
BCl3
|
Boron Trichloride
|
|
|
BF3
|
Boron Trifluoride
|
|
|
C2F6
|
Hexafluoroethane
|
|
|
C2H2
|
Acetylene
|
|
|
C2H4
|
Ethylene
|
|
|
C3H6
|
Propylene
|
|
|
C3H8
|
Propane
|
|
|
C4F6
|
Hexafluorobutadiene
|
|
|
C4F8
|
Octafluorocyclobutane
|
|
|
CHF3
|
Trifluoromethane
|
|
|
Cl2
|
Chlorine
|
|
|
ClF3
|
Chlorine Trifluoride
|
|
|
CO2
|
Carbon Dioxide
|
|
|
HCl
|
Hydrogen Chloride
|
|
|
H2
|
Hydrogen
|
|
|
HF
|
Hydrogen Fluoride
|
|
|
N2O
|
Nitrous Oxide
|
|
|
NF3
|
Nitrogen Trifluoride
|
|
|
O2
|
Oxygen
|
|
|
PH3
|
Phosphine
|
|
|
SiCl4
|
Silicon Tetrachloride
|
|
|
Others
|
C8H24N4Ti
|
Tetrakistitanium (TDMAT)
|
|
CH3Cl3Si
|
Methyltrichlorosilane (MTS)
|
|
|
HBr
|
Hydrogen Bromide
|
|
